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Ellipsometer
Spectroscopic ellipsometry is a non-destructive and non-contact optical technique which is based on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Ellipsometry utilizes a model-based approach to determine thin film thickness, optical properties, and more.
Information obtained from ellipsometry:
- Film thickness from a few Angstroms to tens of microns
- Optical constants (n,k)
- Material properties: compound alloy composition, porosity, crystallinity, anisotropy, optical bandgap
Technical Features:
- Non-destructive and non-contact
- Very sensitive, especially to ultra-thin films (<10 nm)In-situ real-time monitoring of thin film deposition oretching by rapid kinetic measurements
- No sample preparation
Key Applications
- Biotechnology
- Displays
- Nanotechnology
- Optical Coatings
- Optoelectronics
- Semiconductors
The new UVISEL 2 is the next generation of scanning scientific ellipsometers that delivers the highest level of performance in an innovative, integrated, and fully automated design.
Features
The UVISEL spectroscopic phase modulated ellipsometer is a turn-key thin film metrology instrument for in-line measurement of thin film thickness and optical properties.
UVISEL 2 VUV is specially designed for VUV measurement. There is no oxygen absorption with acquisition. It’s a n unique VUV spectral ellipsometer for high accurancy, unique fast measurement, fast vacuum ability, allowing you to change samples quickly, and using low amounts of nitrogen.
The Auto SE is a fast, easy-to-use automatic ellipsometer that provides results and reports in a matter of seconds, making it an ideal instrument for routine thin film measurements.
Features:
The Smart-SE is an innovative and flexible ellipsometer which provides fast results in either an ex-situ or in-situ configuration.
Features: