PP-TOFMS couples a glow discharge plasma to an ultra-fast Time of Flight Mass Spectrometer and provides chemical analysis of solid materials as a function of depth with high speed, high resolution and high sensitivity.
Specifications
- Acquisition rate: 33 kHz to cover elements up to U (a full spectrum every 30 µs)
- Mass resolving power: 3500 at m/s 208, high resolution 5000 at m/z 208
- Dynamic range: 107
- Mass accuracy (m/z error/true m/z): 40 ppm
- Sensitivity: 103 cps/ppm
- Depth resolution: nm
- Both negative and positive ion mode
- Flexible blanking capability up to 4 ions
- Easy and horizontal sample mounting
Features:
- Fast and direct analysis: Without any preliminary preparation and UHV chamber
- All types of materials and coatings
- Full mass coverage: Offers elemental (from H to U) and molecular information, including isotopic monitoring
- Unique 3D data
- High depth resolution: layers as thin as 1 nm can be measured
- Thin and thick layers: thickness up to 100 µm
- Semi-quantitative analysis: Minimal matrix effects due to the separation of sputtering and ionization processes