The new UVISEL 2 is the next generation of scanning scientific ellipsometers that delivers the highest level of performance in an innovative, integrated, and fully automated design.
- Fully automated and integrated
- New optics and electronics for fast and accurate measurements
- Phase modulation with a high frequency PEM for fast data acquisition and no moving optical components
- 8 achromatic microspots down to 35 μm
- Patented vision system
- Automatic XYZ stage for mapping, auto-focus, and tilt
- Spectral range from 190 nm ~1000 nm or 190 nm ~ 2100 nm